A floating top-electrode electrowetting-on-dielectric system

Dielectric charging effects in floating electrode MEMS capacitive switches

Electrowetting on dielectric experiments using graphene.

We report electrowetting on dielectric (EWOD) experiments using graphene; a transparent, flexible and stretchable nanomaterial. Graphene sheets were synthesized by chemical vapor deposition, and transferred to various substrates (including glass slides and PET films). Reversible contact angle changes were observed on the Teflon-coated graphene electrode with both AC and DC voltages. Nyquist plo...

A scaling model for electrowetting-on-dielectric microfluidic actuators

A hydrodynamic scaling model of droplet actuation in an electrowetting-on-dielectric (EWD) actuator is presented that takes into account the effects of contact angle hysteresis, drag from the filler fluid, drag from the solid walls, and change in the actuation force while a droplet traverses a neighboring electrode. Based on this model, the threshold voltage, VT, for droplet actuation is estima...

Floating Electrode Microelectromechanical System Capacitive Switches: A Different Actuation Mechanism

The paper investigates the actuation mechanism in floating electrode MEMS capacitive switches. It demonstrated that in the pull-in state the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and FowlerNordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt dec...

Low Voltage Electrowetting-on-Dielectric Platform using Multi-Layer Insulators.

A low voltage, two-level-metal, and multi-layer insulator electrowetting-on-dielectric (EWD) platform is presented. Dispensing 300pl droplets from 140nl closed on-chip reservoirs was accomplished with as little as 11.4V solely through EWD forces, and the actuation threshold voltage was 7.2V with a 1Hz voltage switching rate between electrodes. EWD devices were fabricated with a multilayer insul...